Canon Stepper/Scanner Wafer Chucks Refurbishing and Rebuilding

Canon Stepper/Scanner Wafer Chucks Refurbishing and Rebuilding

We build Silicon Carbide and ceramic pin chucks and ring chucks for Canon or or stepper models in various sizes,the chucks will be achieving a highest possible standard of flatness and parallelism on minor micron levels,we also offer refurbishment of the front- and backsides of Canon stepper exposure pin and ring chucks as well as ASML wafer tables.

Utilizing our years of chuck manufacturing experience and expertise,we welcome custom design chucks for all types of equipment and industries,great cost saving and superb service guaranteed.

4" Ceramic Pin Chuck
5" Ceramic Pin Chuck
6" Ceramic Pin Chuck
8" Ceramic Pin Chuck
9" Ceramic Pin Chuck

4" Ceramic Ring Chuck
5" Ceramic Ring Chuck
6" Ceramic Ring Chuck
8" Ceramic Ring Chuck
9" Ceramic Ring Chuck

Custom design chucks

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Wafer Chuck

Vacuum wafer chuck table

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Before Repairing

After repairing

10,000 plus chucks repaired already

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rectangle shape porous ceramic chuck table

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10Inch Square Wafer Chuck

10Inch Square Wafer Chuck

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CHUCK TABLE FOR DFG8540/8560 WAFER GRINDER

CHUCK TABLE FOR DFG8540/8560 WAFER GRINDER

REPAIR OR REBUILD




DFG8540 Front

DFG8540 Back

Great savings,prompt delivery world wide
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Vacuum Chuck Working Station

The semiXicon porous vacuum chuck series are designed for use with thin films and other flat samples. The chuck has uniform distributed pore sizes to assure desirable sucking and holding power for very thin films ,it is gaining application in electronic,semiconductor,medical and optical etc industry. The chucks is of 15 um parallelism over the entire surface and 1/4 NPT holes, you can just add a vacuum pump to make it a working station Dimensions as shown on picture and Drawings can be provided upon request. The series have various shapes and dimensions,but standard one are: Round: 4",5",6",8,"9”,12" Squre: 4",5",6",8 Rectangle:2*4, 4*6, 6*8, 6*12 Turn key solution including pump is optional www.chuck-table.com

The semiXicon porous vacuum chuck series are designed for use with thin films and other flat samples. The chuck has uniform distributed pore sizes to assure desirable sucking and holding power for very thin films ,it is gaining application in electronic,semiconductor,medical and optical etc industry.

The chucks is of 15 um parallelism over the entire surface and 1/4 NPT holes, you can just add a vacuum pump to make it a working station

Dimensions as shown on picture and Drawings can be provided upon request.

The series have various shapes and dimensions,but standard one are:

Round: 4",5",6",8,"9”,12"
Squre: 4",5",6",8
Rectangle:2*4, 4*6, 6*8, 6*12

Turn key solution including pump is optional

www.chuck-table.com

Wafer Chuck Table, Disco,K&S, ADT, regular or custom size

Porous Ceramic Chuck Table, Disco,K&S, ADT, reguar or custom size

 

High parallelism and flatness!
1um on 8" Dia is not only possible ,but also a standard!

semiXicon is serving the world semi conductor industry right from the heart of the world semi conductor industry-- the silicon valley.

We provide porous ceramic chuck table,dicing blade,diamond slurry, end effector etc for ADT, K&S, DISCO machines.

Porous ceramic vacuum chuck table or Polishing Chuck table supplied to 
semiconductor industry for silicon wafer dicing or finishing purposes

.
This product is an uniform compact frame, high strength, good porosity, durable absorption, excellent quality with high efficiency, no pollution, high fixing precision.Available sizes diameter of round and square ,4inch,5inch,6 inch , 8 inch ,9 inch, 12 inch and custom size or design with high parallelism and flatness.
Services Provided as below:
.Fabrication New Porous Ceramic Vacuum Chuck
.Repair uneven surfaces and parallelize the porous chuck
.Refurbish the unusable chuck with new porous ceramic plate

Need more information? please feel free to contact

California, USA
www.chuck-table.com